Plateforme Technologique Amont
Jeol 6300FS Ebeam system
LTM jointly runs the PTA (Plateforme Technologique Amont or Up-Line Technological Plateform) with other labs from CNRS-FMNT and CEA-INAC
The aim of the PTA is to meet the requirements of the Grenoble scientific community by providing access to high-performance technological facilities housed together in the same clean room.
Located on the site of the CEA Grenoble, the PTA naturally occupies a leading position in the field of nanosciences and boasts a mode of operation that is deliberately flexible and accessible.
Main facilities offered by the PTA are:
- Lithography systems, in particular a 100kV high resolution JBX 6300FS Jeol electron beam writer
- Deposition and etching tools
- Metrology and characterization tools
- Tools for Micro & Nano systems
For more information, please visit PTA website
