
[03/01/2012]
soutenance de thèse d'Alexis Potié. Jeudi 5 janvier, 14 h au CNRS-gélégation
le titre de la thèse est : "Étude de la croissancede nanofils SiGe par CVD et caractérisation de nanofils par microscopie à force atomique" Cette thèse a été préparée en collaboration entre le LTM et l'IMEP-LAHC et a bénéficié d'un soutien BQR de l'INPG. Dans le cadre de ces travaux, le doctorant a tout d’abord étudié les propriétés mécaniques et piézoélectriques de nanofils de GaN à l’échelle du nanofils unique par AFM. Dans un deuxième temps, la croissance par CVD de nanofils de SiGe a été étudiée en utilisant l’or comme catalyseur. il a ensuite analysé l’influence du HCl en phase gazeuse qui permet un contrôle de la croissance de nanofils de SiGe. Il a enfin étudié la croissance de nanofils compatible avec les procédés de la microélectronique : croissance de nanofils de SiGe catalysée par siliciures, et croissances à basse température. Des nanofils hétérostructurés Si/SiGe ont enfin été élaborés. la soutenance aura lieu le jeudi 5 janvier à 14heures à l'amphithéâtre du CNRS, délégation régionale.


[01/06/2011]
LTM will coordinate MINOS research program (Labex program)
In the framework of Labex program, LTM will coordinate Minatec Novel Devices Scaling Laboratory (MINOS). The scientific program of MINOS Lab will investigate technological ruptures envisioned for the scaling of nanoelectronics devices. Three major projects related to innovative devices constitute the heart of its program, namely: Fully Depleted Silicon On Insulator technologies, alternative architecture devices and innovative embedded memory devices. Those three projects will be accompanied by transversal research work packages in the field of material deposition, patterning technologies, modelling and electrical& physical characterization techniques. MINOS lab involves more than 400 people issued from CEA-Leti, LTM, IMEP-LAHC and LMGP laboratories in Grenoble. MINOS Lab will be coordinated by Olivier Joubert, Director of LTM, contact: Olivier.joubert@cea.fr


[10/03/2011]
LTM makes the cover of Applied Physics Letters issue
This work presents optical properties from a new type optical nanoresonator. The reported structure consists in an array of evanescently coupled single mode photonic crystal nanocavities. SNOM experiments quantify the morphology of the different optical mode volumes and show that they consist in grids of light confined at the subwavelength scale. This work opens perspectives to achieve on a chip an active control of the spatial distribution of optical forces, traps, detection volumes, and to develop a new class of configurable optofluidic nanosystems. This work is a result from a strong collaboration between ICB (Dijon), CEA/INAC/SP2M/SiNaPs and LTM concretized by several common PhD students and ANR programs. Appl. Phys. Lett. Vol. 98 Iss. 8 21fev 2011 Contact: david.peyrade@cea.fr


[14/02/2011]
LTM will built a unique characterisation plateform (Equipex program)
In the framework of Equipex program, LTM will built a unique characterisation platform dedicated to In-situ Materials, Processes and Architecture Characterization and Test. IMPACT platform will consist in various characterization tools (XPS, Ellipsometry, Nanoprober,..) which will be virtually connected to process modules by using vacuum carriers and by mounting vacuum carrier interfaces on process modules. The use of this platform will allow LTM and his partners to carry on in situ analysis of vacuum-based processes (deposition, cleaning, dry etching) while keeping the wafers away from any environmental contamination in the clean room. Besides, it will be possible to perform thorough wafers analysis in conditions as close as possible to the process conditions, and to bring back the wafer in the process module for continuing the process flow. Contact: maxime.darnon@cea.fr


[14/10/2010]
T. Honegger won first prize of the MNE 2010 Micro Nano Graph Contest
T. Honegger won the prestigious First Prize of the Micro Nano Graph Contest sponsored by Zyvex labs at the 36th International Conf. on Micro&Nano Engineering that took place in in Genoa (Italy) in September 2010. This contest rewards the best electron or ion micrograph of the conference. The “March of the Penguins” represents a 2-photon polymerization of Poly-Ethylene-Glycol. It was selected by an international jury over 70 micrographs proposed by the international community in the nanotechnology/nanoscience area. This is the second time that the LTM/BioColloNa team wins this award. In 2008, T. Pinedo-Rivera won the Grand Prize MicroGraph Contest at the 52th International Conference on Electron, Ion and Photon Technology and Nanofabrication in Portland (USA).