Customized Escalab 220i XPS spectrometer from VG scientific
This spectrometer has 200mm wafers loading capability and is equipped with monochromatic (Al) and non monochromatic (twin Al and Mg) X ray sources.
A UV source is also installed on the chamber to perform UPS analyses.
A special robotised 200mm transfer chamber allows quasi insitu analyses of wafers coming from an industrial 200mm plasma etching cluster.
