Electrical characterization tool
The equipment comprises a probe station (Signatone), an AC impedance analyzer (Novocontrol) and a DC SourceMeter unit (Keithley). This equipment allows the measurements of C-V, I-V (down to the pA range) and Z(f) (mHz-MHz range). Probing can be performed on 200 mm wafers, up to 300°C.
Examples of typical analysis: permittivity and loss of high-k materials (frequency and voltage dependence), leakage currents in high-k oxides, gate-oxide reliability (breakdown), high-k MIM capacitor characteristics (non-linearity), resistance switching in ReRAM materials.
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