Modified Theta 300 XPS spectrometer from Thermo Fisher Scientific

This XPS platform is based on a Standard Theta 300 spectrometer which has been modified with specific loading / transfer facilities.

The specifications of the spectrometer are:

Parallel Angle Resolved XPS PARXPS capabilities: allowing acquisition of a great number of angles (up to 24), in only one shot and without any wafer tilting or lens displacement. This very specific feature allows accurate thickness measurements at the nm scale as well as non destructive depth profiling for the first 5 nm of the sample surface
Computer controlled ion etching for depth profiling
Computer controlled flood gun for charge compensation
Automated mapping on the whole 300mm surface

A special robotised 300mm transfer chamber, combined with a specific vaccum loading interface designed by Adixen allows :

Very versatile loading capabilities (300mm, 200mm, small sample, 6'' inches litho masks, ...) using special Adixen Vaccum carriers
Quasi insitu analyses of wafers coming from the industrial 300mm plasma etching cluster (Centura 300 plasma etching cluster), directly connected to the transfer chamber
"Remotely" quasi insitu analyses of wafers coming from other 200mm or 300mm process tools (i.e. MOCVD ), using the Adixen mobile vacuum carriers concept