Phase modulation ellipsometer
32 PM multichannel acquisition at 32 wavelenght
Spectroscopic analysis: 32pts every 12s
Dynamic: a full scan ( 200nm - 650nm) takes 50 ms
Xenon lamp: 190nm - 850nm
Thermally regulated chuck: -60°C up to 200°C
Goniometer: 55° up to 85°
In situ UV irradiation for UV curable resist monitoring
