Ultra high vaccum AFM STM

The ultrahigh vacuum (UHV) AFM/STM from Omicron Nanotechnology GmbH allows to analyse small samples (~1x1 cm) by STM and in contact and non-contact mode AFM. Pressures as low as 10-10 mbar can be reached with an ion pump and a titanium sublimation pump. The AFM/STM chamber is permanently maintained under UHV. Samples are introduced via a load lock and a transfer chamber. Before analysis, samples can be baked out in the load lock. The XY scan range is 5 µm and the z range 1 µm. The system is controlled by the ScalaPro software. Additional functionalities have been added to be able to perform EFM and TUNA studies.

Equipments

Characterization tools

Centre National de la Recherche Scientifique

Université Joseph Fourier

Institut National Polytechnique de Grenoble

commissariat à l'Energie Atomique