NEWS PUBLICATIONS JOB OPPORTUNITIES CONTACT DIRECTORY
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Advanced lithography
Nanomaterials & integration
Plasma etching for nano electronics and emerging devices
Laboratory
Presentation
Collaborations & Industrial partnership
Contracts
Staff
Equipments
Fabrication tools
Characterization tools
BioColloNa plateform
Up-line technological platform (PTA)
Overview
Centura 5200 plasma etching cluster
Centura 300 plasma etching cluster
EVG UV NIL Stepper
MOCVD reactor coupled with UHV AFM-STM
Thermal nanoimprint equipement
UV Mask aligner
