UV Mask aligner
Suss Microtech MJB4 is an UV mask aligner.
It’s used to make lithography with a Chrome/quartz mask on different type of substrate, from a 4 inch silicon wafer to small samples. We work with the 2 different kinds of resists, positive and negative.
The thickness of the resist is between 1µm and 100µm. Delivered power is 37 mW/cm² at 365nm. With this tool, you can obtain 1µm patterns.
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