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Advanced lithography
Nanomaterials & integration
Plasma etching for nano electronics and emerging devices
Laboratory
Presentation
Collaborations & Industrial partnership
Contracts
Staff
Equipments
Fabrication tools
Characterization tools
BioColloNa plateform
Up-line technological platform (PTA)
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Research
Nanomaterials and integration
Overview
Memories operating at high temperature
3D integration based on nanowires growth
Biological and colloidal nanodevices
Publications
