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Advanced lithography
Nanomaterials & integration
Plasma etching for nano electronics and emerging devices
Laboratory
Presentation
Collaborations & Industrial partnership
Contracts
Staff
Equipments
Fabrication tools
Characterization tools
BioColloNa plateform
Up-line technological platform (PTA)
Articles - Thesis - Patents
ARTICLES
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THESIS
PATENTS
Research
Plasma etching
Overview
Plasma etching processes for advanced CMOS devices
Pulsed plasmas processes for nanoelectronics and emerging devices
Plasma etching processes for spin electronic devices
Publications
